Ceradyne utilizes its extensive material knowledge and manufacturing capabilities
to produce custom components for semiconductor OEM’s and Fabs, resulting in both
higher production rate and yields for water processing materials.
Ceradyne’s semiconductor material portfolio includes:
- Aluminum Nitride
- Silicon Carbide
- Silicon Nitride
- Boron Carbide
- Yttrium Oxide
These materials have special formulations designed to minimize impurities that may
be detrimental to wafer processing materials. The formulations also maximize wear
resistance of components in the corrosive environment of the wafer processing chamber.
Components as large as 700 mm in diameter can be produced.
Ceradyne’s semiconductor materials are covalently bonded and generally have the
best wear resistance in wafer processing environments involving bombardment erosion
and chemical corrosion. The measured wear resistance of these materials is superior
to the more conventional materials such as quartz, polycrystalline silicon and aluminum
oxide. These materials are used in a number of wafer processing areas including
CVD, lithography, plasma etching and thermal processing.
Ceralloy® Aluminum Nitride used for semiconductor components exhibits chemical
wear resistance, high electrical resistivity and high thermal conductivity. It is
used to manufacture clamp rings, cover plates, dummy wafers, e-chucks, insulators,
RF / microwave windows, thick film heaters (where a high degree of temperature control
is required) and vacuum chucks.
Ceralloy® Silicon Carbide used for semiconductor components demonstrates
chemical wear resistance, controlled resistivity, high thermal conductivity and
thermal shock resistance. It is used to manufacture chamber domes, DC plugs, dummy
wafers, end effectors, focus rings (inner rings), lapping plates, susceptors, vacuum
chucks and wafer carriers.
Ceralloy® Silicon Nitride is used for semiconductor components because it
exhibits both chemical wear resistance and high electrical resistivity. It is used
to manufacture focus rings (outer rings), gas distribution plates and insulators.
Ceralloy® Yttrium Oxide is used for semiconductor components due to its chemical
stablity. It is used to manufacture cover rings, gas distribution plates and stepped
rings.