Ceradyne utilizes its extensive material knowledge and manufacturing capabilities to produce custom components
for semiconductor equipment OEM’s and Fabs, that result a higher production rate for wafer processing materials.
Ceradyne’s semiconductor material portfolio includes:
These materials have special formulations specifically designed to minimize impurities that may be
detrimental to silicon wafers and wafer processing materials. These special formulations also maximize
wear resistance of components in the wafer processing chamber corrosive environment. Components can be
produced to 28 inches (700 mm) in diameter.
Ceradyne’s semiconductor materials are covalently bonded and generally have the best wear resistance in
wafer processing environments involving bombardment erosion and chemical corrosion. They are used in a
number of wafer processing materials and areas:
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Plasma Etching
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CVD
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Lithography
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Thermal Processing
The measured wear resistance of these materials is superior to the more conventional materials such as quartz, polycrystalline silicon and aluminum oxide.
The Aluminum Nitride used in semiconductor components exhibits chemical wear resistance, high electrical resistivity and high thermal conductivity. It is used to manufacture:
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Thick Film Heaters where a high degree of temperature control is required
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Clamp Rings
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Cover Plates
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e-Chucks
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Vacuum Chucks
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RF / Microwave Windows
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Dummy Wafers
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Insulators
Ceradyne’s semiconductor components also contain Silicon Carbide,
which has chemical wear resistance, controlled Resistivity, high thermal conductivity
and thermal shock resistance. It is used to manufacture:
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Focus Rings (Inner Rings)
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Dummy Wafers
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DC Plugs
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Susceptors
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Vacuum Chucks
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Lapping Plates
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End Effectors
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Chamber Domes
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Wafer Carriers
The Silicon Nitride in Ceradyne’s semiconductor components exhibits
chemical wear resistance and high electrical Resistivity. It is used to manufacture:
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Focus Rings (Outer Rings)
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Gas Distributions Plates
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Insulators
Yttrium Oxide is also used in semiconductor components and
is chemically stable therefore used to manufacture:
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Cover Rings
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Stepped Rings
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Gas Distribution Plates
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