Established in March of 2000 and recently acquired by Ceradyne, Inc., SemEquip, Inc. is the technology
leader in the development of cluster ion implantation sub-systems and advanced ion source materials for
the manufacture of logic and memory chips. SemEquip's technologies enable the utilization of cluster beam
ion implantation for manufacturing the world's most advanced integrated circuits at the lowest cost
and highest throughput.
SemEquip ion sources are developed for the semiconductor industry where they are a critical component
of ion implanters which are used to modify the conductivity of selective regions of the silicon wafer
to create transistors. SemEquip implant materials include ClusterBoron® ,B18H22, the doping material
of the future that enables ultra low energy, high dose implants; and ClusterCarbon™, a molecular carbon
implant material for enhancing the speed of transistors or reducing device power requirements.
SemEquip Website
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